Steve Grantham received his Ph.D. from the University of Central Florida’s Center for Research and Education in Optics and Lasers (CREOL). His graduate research involved the study and application of short pulse laser produced plasmas. Since 1999 he has worked at NIST with an emphasis on EUV metrology for EUV lithography applications.
Sensor Science Division
Ultraviolet Radiation Group
2000, NIST, Gaithersburg, MD
Ph.D. Optical Sciences and Engineering, The University of Central Florida/CREOL, Orlando, FL
B.S. Electrical Engineering, The Johns Hopkins University, Baltimore, MD