NIST logo
Bookmark and Share

Synchrotron Ultraviolet Radiation Facility SURF III


The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.

  • Provides our National standards for UV and EUV radiometry
    • Monitoring space weather and solar variability
    • Advancing industrial uses – e.g. EUV microlithography, UV curing
  • Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography
  • Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
  • Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
  • Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum

General SURF Program Inquiries

Thomas Lucatorto
SURF Accelerator Systems Edward Hagley
Synchrotron Radiation Applications Uwe Arp
Extreme-ultraviolet Program Thomas Lucatorto
Beamline 1 Extreme-ultraviolet multilayer degradation studies
Properties of extreme-ultraviolet photoresists
Charles Tarrio, Steve Grantham, Robert Berg
Beamline 2 Absolute source-based irradiance calibrations of radiometric instrumentation Mitch Furst
Beamline 3 Center for Advanced Synchrotron Radiation-Based Metrology Thomas Lucatorto, Jack Rife, Rob Vest, Uwe Arp
Beamline 4 Ultraviolet optical properties and calibrations Ping-Shine Shaw, Uwe Arp
Beamline 5 New Beam Imaging System Uwe Arp
Beamline 6 Current monitor Edward Hagley, Alex Farrell, Mitch Furst
Beamline 6B Educational Display Charles Clark
Beamline 7 Extreme-ultraviolet optical properties and calibrations Charles Tarrio, Steve Grantham
Beamline 8 Extreme-ultraviolet multilayer endurance testing Shannon Hill, John Curry
Beamline 9 Extreme-ultraviolet detector calibrations Rob Vest
Beamline 10 Beam Imaging Uwe Arp
Panoramic view from the west of the machine hall of the SURF III Synchrotron Ultraviolet Radiation Facility.

Name: Thomas Lucatorto
Phone: 301-975-3734
100 Bureau Dr, MS 8411
Gaithersburg, MD 20899-8411

Name: Edward Hagley
Phone: 301-975-6381

Name: Mitchell Furst
Phone: 301-975-6378

Name: Alex Farrell
Phone: 301-975-8372

Name: Uwe Arp
Phone: 301-975-3233