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Laser Power and Energy Calibrations

 The Optoelectronics Division currently provides calibration services for meters used with the lasers, wavelengths, and power ranges shown in the following table. Other laser wavelengths, power, and energy levels are available upon request as Special Tests. Please contact Marla Dowell for additional information.

LASER POWER AND ENERGY METERS
 
Description
Wavelength
Range
Documentation
Contact
Optical Fiber Power  
Absolute Power Calibration
670, 780, 850, 980, 1310, 1480, 1550, and 1625 nm
10 - 100 mW
Igor Vayshenker
980 nm
0.1 - 200 mW
Optical Fiber Power Meter Linearity
850, 980, 1300, 1480, and 1550 nm
-90 to 0 dBm
980 and 1480 nm
0 to 30 dBm
Spectral Responsivity of Laser and Optical Fiber Power Meters 400 - 1700 nm 10 - 100 mW SP250-53 Josh Hadler
CW HeCd laser 325 nm 1 µW - 10 mW SP250-75

Josh Hadler

Argon laser 351 and 364 nm

1 µW - 1 W

488 nm 1 µW - 6 W
514 nm 1 µW - 10 W
HeNe laser 633 nm 1 µW - 20 mW
Diode laser 830 nm 1 µW - 20 mW
Nd:YAG laser 532 nm 1 µW - 2 W
1064 nm 1 µW - 800 W (6 kW off-site)
1319 nm 1 µW - 25 mW
Erbium laser 1550 nm 1 µW - 100 mW
Ti:Sapphire laser 700 - 950 nm 1 nW - 1 W
CO2 laser 10.6 µm

1 W to 1.5 kW (6 kW off-site)

NIST 2004

Josh Hadler
Dye laser Contact Josh Hadler for details.
High Accuracy Laser Measurments 375 to 1700 nm 0.1 - 1 mW SP250-62 David Livigni
Pulsed Q-Switched
Nd:YAG laser
1.06 µm 1 - 300 mJ/pulse energy
1 mW to 6 W average power
1 - 20 Hz laser repetition rate
  David Livigni
Low Level
Nd:YAG laser
1.06 µm 10-4 - 10-8 W (peak power)
10-11 - 10-15 J/pulse energy
10 Hz to 300 kHz laser repetition rate
SP250-64 Rod Leonhardt
KrF excimer laser 248 nm

5 µJ/Pulse - 250 mJ/pulse energy
50 µW - 7 W average
1 - 200 Hz laser repetition rate

ULSI 1998 David Livigni
ArF excimer laser 193 nm

5 µJ/Pulse - 5 mJ/pulse energy
10 µW - 3 W average power
1 - 400 Hz laser repetition rate

ULSI 2000
F2 excimer laser 157 nm

1 µJ/Pulse - 1 mJ/Pulse eneryg
10 µW - 1 W average power
1 - 200 Hz laser repetition rate

Microlithography 2002