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Topic Area: Nanofabrication, Nanomanufacturing, and Nanoprocessing

Displaying records 1 to 10 of 98 records.
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1. Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/2/2014
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Richard M Silver, Andras Vladar, Abraham Arceo
Abstract: We have previously introduced a new data analysis method that more thoroughly utilizes scattered optical intensity data collected during defect inspection using bright-field microscopy. This volumetric approach allows conversion of focus resolved 2-D ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915807

2. Advances in source technology for focused ion beam instruments
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/1/2014
Authors: Noel Smith, John Notte, Adam V Steele
Abstract: Owing to the development of new ion source technology, users of focused ion beams (FIBs) have an increasingly wide array of uniquely capable platforms to choose from. Specifically, the new ion sources are able to offer superior performance in severa ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915133

3. Does Your SEM Really Tell the Truth? Part 2
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The first paper in this series, discussed some of the issues related to signal generat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913866

4. Strong Casimir force reduction by metallic surface nanostructuring
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/27/2013
Authors: Francesco Intravaia, Stefan T. Koev, Il Woong Jung, Albert A. Talin, Paul S Davids, Ricardo Decca, Vladimir A Aksyuk, Diego A. R. Dalvit, Daniel Lopez
Abstract: The Casimir force is a quantum-mechanical interaction arising from vacuum fluctuations of the electromagnetic (EM) field and is technologically significant in micro- and nanomechanical systems. Despite rapid progress in nanophotonics, the goal of e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910133

5. Fabrication and characterization of nanostructured III-V thermoelectric materials
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/26/2013
Authors: Clint Joseph Novotny, Fred Sharifi
Abstract: Approximately two thirds of all fossil fuel used is lost as heat. Thermoelectric materials, which convert heat into electrical energy, may provide a solution to partially recover some of this lost energy. To date, most commercial thermoelectric mater ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914496

6. Block-copolymer healing of simple defects in a chemoepitaxial template
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/11/2013
Authors: Paul N. Patrone, Gregg M. Gallatin
Abstract: Using a phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. The model, which is an extension of the Leibler-Ohta-Kawasaki theory, accoun ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913545

7. The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/29/2013
Authors: Liya Yu, Richard J Kasica, Robert Dennis Newby, Lei Chen, Vincent K Luciani
Abstract: This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of photol ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913677

8. Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/26/2013
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage is presented based on bulk mic ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913234

9. Quantum Dot-DNA Origami Binding : A Single Particle, 3D, Real-Time Tracking Study
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 1/2/2013
Authors: Kan K. Du, Seung-Hyeon Ko, Gregg M. Gallatin, Heayoung Yoon, James Alexander Liddle, Andrew J. Berglund
Abstract: The binding process of quantum dots and DNA origami was monitored using a 3D, real-time, single-particle tracking system. Single-molecule binding events were directly observed and precise measurements of the diffusion coefficient and second-order pho ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912604

10. Temperature-dependent mechanical-resonance frequencies and damping in ensembles of gallium nitride nanowires
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 10/22/2012
Authors: Kristine A Bertness, Norman A Sanford, J. R. Montague, H.S. Park, Victor M. Bright, C. T. Rogers
Abstract: We have measured singly clamped cantilever mechanical-resonances in ensembles of as-grown gallium nitridenanowires (GaN NWs), from 12 K to 320 K. Resonance frequencies are approximately linearly dependent on temperature near 300 K ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910038



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