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Topic Area: Synchrotron

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1. The NIST EUV facility for advanced photoresist qualification using the witness-sample test
Topic: Synchrotron
Published: 8/29/2011
Authors: Steven Grantham, Charles S. Tarrio, Shannon Bradley Hill, Lee J Richter, Thomas B Lucatorto, J. van Dijk, C. Kaya, N. Harned, R. Hoefnagels, M. Silova, J. Steinhoff
Abstract: Before being used in an extreme-ultraviolet (EUV) scanner, photoresists must first be qualified to ensure that they will not excessively contaminate the scanner optics or other parts of the vacuum environment of the scanner. At the National Institute ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=908029

2. Metrologia
Topic: Synchrotron
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=907243

3. Bilateral NIST-PTB Comparison of Spectral Responsivity in the VUV
Topic: Synchrotron
Published: 1/20/2011
Authors: Uwe Arp, Ping-Shine Shaw, Zhigang Li, Alexander Gottwald, Mathias Richter
Abstract: To compare the calibration capabilities for the spectral responsivity in the vacuum-ultraviolet spectral region between 135 nm and 250 nm, PTB and NIST agreed on a bilateral comparison. Calibrations of semiconductor photodiodes as transfer detectors ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=905153

4. Synchrotron Radiation Based Irradiance Calibration From 200 nm to 400 nm at SURF III
Topic: Synchrotron
Published: 1/1/2007
Authors: Uwe Arp, Charles E Gibson, Keith R Lykke, Albert C. Parr, Robert D. Saunders, D J Shin, Ping-Shine Shaw, Zhigang Li, Howard W Yoon
Abstract: A new facility for measuring source irradiance was commissioned recently at the National Institute of Standards and Technology (NIST). The facility uses the calculable radiation from the Synchrotron Ultraviolet Radiation Facility (SURF III) as the pr ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=841022