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Topic Area: Nanotechnology

Displaying records 21 to 30 of 384 records.
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21. Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection
Topic: Nanotechnology
Published: 6/24/2013
Authors: Bryan M Barnes, Martin Y Sohn, Francois R. Goasmat, Hui Zhou, Richard M Silver, Abraham Arceo
Abstract: Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913510

22. Dimensional Metrology and Imaging of Cellulose Nanocrystals
Topic: Nanotechnology
Published: 6/14/2013
Authors: Michael T Postek, Andras Vladar
Abstract: Cellulose nanocrystals are one group of nanoparticles that have high potential economic value but, also present many basic research and manufacturing challenges. These challenges are not only in development of the fundamental processes needed for the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914004

23. Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node
Topic: Nanotechnology
Published: 6/7/2013
Authors: Ravikiran (Ravikiran) Attota, Benjamin D. Bunday, Victor Vertanian
Abstract: We present results using simulations and experiments to demonstrate metrological applications of the through-focus scanning optical microscopy (TSOM) down to features at and well below the International Technology Roadmap for Semiconductors' 22  ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913353

24. Preparation of Nanoscale TiO2 Dispersions in an Environmental Matrix for Eco-Toxicological Assessment
Series: Special Publication (NIST SP)
Report Number: 1200-5r1
Topic: Nanotechnology
Published: 6/3/2013
Authors: Julian S. Taurozzi, Vincent A Hackley, Mark R Wiesner
Abstract: Toxicity and fate assessment are key elements in the evaluation of the environmental, health and safety risks of engineered nanomaterials (ENMs). While significant effort and resources have been devoted to the toxicological evaluation of many ENMs, i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913712

25. Sensitivity of gold nano conductors to common contaminations ‹ ab initio results
Topic: Nanotechnology
Published: 5/29/2013
Authors: Shmuel Barzilai, Francesca M Tavazza, Lyle E Levine
Abstract: Gold nanowire chains are considered a good candidate for nanoelectronic devices because they exhibit remarkable structural and electrical properties. A previous study shows that the beryllium terminated BeO (0001) surface may be a useful platform for ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913345

26. Nanoparticles in Flame-Retardant Coatings for Flexible Polyurethane Foams: Effects on Flammability and Nanoparticle Release
Topic: Nanotechnology
Published: 5/15/2013
Authors: Mauro Zammarano, Rick D. Davis, Yeon Seok Kim, Richard H. Harris Jr., Marc R. Nyden, Jeffrey W Gilman, Nasir M. Uddin
Abstract: Nanoparticles can effectively reduce polymer flammability; however, the impact of nanoparticles on environmental and health safety is still unclear. The purpose of this study is twofold: (1) to develop and investigate the effect of nanoparticle-rich- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913190

27. Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism
Topic: Nanotechnology
Published: 4/30/2013
Authors: Mohammad Olfatnia, Siddharth Sood, Jason John Gorman, Shorya Awtar
Abstract: This paper reports in-plane electrostatic combdrive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. The C-DP-DP flexure mechanism design offers high b ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912124

28. Single laser pulse effects on suspended-Au-nanoparticle size distributions and morphology
Topic: Nanotechnology
Published: 4/30/2013
Authors: Richard E Cavicchi, Douglas C Meier, Cary Presser, Suvajyoti S. Guha
Abstract: Samples of suspended gold nanoparticles in the diameter range 10 nm to 100 nm were subjected to a single 7 ns pulse from a 532 nm laser to determine the effects of laser power on particle size distribution, mean size, and morphology. The experime ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912928

29. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran (Ravikiran) Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913667

30. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran (Ravikiran) Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698



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