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Topic Area: Nanotechnology

Displaying records 31 to 40 of 387 records.
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31. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran (Ravikiran) Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913667

32. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran (Ravikiran) Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698

33. The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
Topic: Nanotechnology
Published: 3/29/2013
Authors: Liya Yu, Richard J Kasica, Robert Dennis Newby, Lei Chen, Vincent K Luciani
Abstract: This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of photol ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913677

34. Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Topic: Nanotechnology
Published: 3/26/2013
Authors: Erik M Secula, David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913713

35. Discriminating the states of matter in metallic nanoparticle transformations: What are we missing?
Topic: Nanotechnology
Published: 2/20/2013
Authors: John M Pettibone, Julien C. Gigault, Vincent A Hackley
Abstract: A limiting factor in assessing the risk of current and emerging nanomaterials in biological and environmental systems is the ability to accurately detect and characterize their size, shape and composition in broad distributions and complex media. Asy ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913009

36. Stable Field Emission from Nanoporous Silicon Carbide
Topic: Nanotechnology
Published: 2/15/2013
Authors: Myung Gyu Kang, Henri J Lezec, Fred Sharifi
Abstract: A new method for fabrication of high current density field emitters based on nanoporous silicon carbide is presented. The emitters are monolithic structures which do not require high temperature gas phase synthesis and the process is compatible with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910029

37. ELECTRICAL AND PHYSICAL CHARACTERIZATION OF BILAYER CARBOXYLIC ACID FUNCTIONALIZED MOLECULAR LAYERS
Topic: Nanotechnology
Published: 1/30/2013
Authors: Sujitra Jeanie Pookpanratana, Joseph William Robertson, Cherno Jaye, Daniel A Fischer, Curt A Richter, Christina Ann Hacker
Abstract: We have used Flip Chip Lamination (FCL) to form monolayer and bilayer molecular junctions of carboxylic acid-containing molecules with Cu atom incorporation. Carboxylic acid-terminated monolayers are self-assembled onto ultrasmooth Au using thiol che ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912203

38. Real-Time Size Discrimination and Elemental Analysis of Gold Nanoparticles using ES-DMA coupled to ICP-MS
Topic: Nanotechnology
Published: 1/22/2013
Authors: Sherrie R. Elzey, De-Hao D. Tsai, Lee Lijian Yu, Michael R Winchester, Michael E Kelley, Vincent A Hackley
Abstract: We report the development of a hyphenated instrument with the capacity to quantitatively characterize aqueous suspended gold nanoparticles (AuNPs) based on a combination of gas-phase size separation, particle counting, and elemental analysis. A custo ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912171

39. Standard Guide for Size Measurement of Nanoparticles Using Atomic Force Microscopy
Topic: Nanotechnology
Published: 1/1/2013
Authors: Vincent A Hackley, Frank W DelRio
Abstract: The purpose of this document is to provide guidance on the quantitative application of atomic force microscopy (AFM)to determine the size of nanoparticles2 deposited in dry form on flat substrates using height (z-displacement) measurement. Unlike ele ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912221

40. Preface, Introduction and Chapter 11 to appear in the book Control from MEMS to Atoms
Topic: Nanotechnology
Published: 12/31/2012
Authors: Jason John Gorman, Benjamin Shapiro
Abstract: Preface Abstract: This is the preface of the book. No abstract is available. Introduction Abstract: The goal of this book is to show how control systems can be successfully applied to applications in micro- and nanosystems, to explore the wide v ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907965



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