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Topic Area: Nanotechnology
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1. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=913667

2. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=913698

3. Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Topic: Nanotechnology
Published: 3/26/2013
Authors: Erik M Secula, David G Seiler
http://nist.gov/manuscript-publication-search.cfm?pub_id=913713

4. Discriminating the states of matter in metallic nanoparticle transformations: What are we missing?
Topic: Nanotechnology
Published: 2/20/2013
Authors: John M. Pettibone, Julien Claude Maurice Gigault, Vincent A Hackley
Abstract: A limiting factor in assessing the risk of current and emerging nanomaterials in biological and environmental systems is the ability to accurately detect and characterize their size, shape and composition in broad distributions and complex media. Asy ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=913009

5. Stable Field Emission from Nanoporous Silicon Carbide
Topic: Nanotechnology
Published: 2/15/2013
Authors: Myung Gyu Kang, Henri J Lezec, Fred Sharifi
Abstract: A new method for fabrication of high current density field emitters based on nanoporous silicon carbide is presented. The emitters are monolithic structures which do not require high temperature gas phase synthesis and the process is compatible with ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=910029

6. ELECTRICAL AND PHYSICAL CHARACTERIZATION OF BILAYER CARBOXYLIC ACID FUNCTIONALIZED MOLECULAR LAYERS
Topic: Nanotechnology
Published: 1/30/2013
Authors: Sujitra Jeanie Pookpanratana, Joseph William Robertson, Cherno Jaye, Daniel A Fischer, Curt A Richter, Christina Ann Hacker
Abstract: We have used Flip Chip Lamination (FCL) to form monolayer and bilayer molecular junctions of carboxylic acid-containing molecules with Cu atom incorporation. Carboxylic acid-terminated monolayers are self-assembled onto ultrasmooth Au using thiol che ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=912203

7. Real-Time Size Discrimination and Elemental Analysis of Gold Nanoparticles using ES-DMA coupled to ICP-MS
Topic: Nanotechnology
Published: 1/22/2013
Authors: Sherrie R. Elzey, De-Hao Tsai, Lee Lijian Yu, Michael R Winchester, Michael E Kelley, Vincent A Hackley
Abstract: We report the development of a hyphenated instrument with the capacity to quantitatively characterize aqueous suspended gold nanoparticles (AuNPs) based on a combination of gas-phase size separation, particle counting, and elemental analysis. A custo ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=912171

8. Automated Multiprobe Microassembly using Vision Feedback
Topic: Nanotechnology
Published: 10/5/2012
Authors: John D. Wason, John T Wen, Jason John Gorman, Nicholas G Dagalakis
Abstract: This paper describes the algorithm development and experimental results of a vision-guided multi-probe microassembly system. The key focus is to develop the capabilities required for the construction of three dimensional (3D) structures using only pl ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=911112

9. Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation
Topic: Nanotechnology
Published: 8/29/2012
Authors: Yong Sik Kim, Jae Myung Yoo, Seung Ho Yang, Young M. Choi, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: In micro-electro-mechanical systems (MEMS) it is difficult to obtain large range of motion with small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=911710

10. Characterization of Surface Accumulation and Release of Nanosilica During Irradiation of Polymer Nanocomposites with Ultraviolet Light
Topic: Nanotechnology
Published: 8/12/2012
Authors: Tinh Nguyen, Bastien T. Pellegrin, Coralie Bernard, Savelas A Rabb, Paul E Stutzman, Justin M Gorham, Xiaohong Gu, Lee Lijian Yu, Joannie W Chin
Abstract: Nanofillers are increasingly used for enhancing multiple properties of polymeric materials in many applications. However, polymers are susceptible to photodegradation by solar ultraviolet (UV) radiation Therefore, nanofillers in a polymer nanocompos ...
http://nist.gov/manuscript-publication-search.cfm?pub_id=909878