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Programs and Projects
Degradation of extreme-ultraviolet optics

Optical systems that operate at wavelengths in the ultraviolet (UV) and extreme-ultraviolet (EUV) are susceptible to degradation by a number of … more

Metrology for extreme ultraviolet lithography

Much of the activity of the UV Physics Group is aimed at supporting the R&D effort by the microelectronics industry to develop Extreme … more

Vacuum-Ultraviolet Optical Properties of Cryogenic Water Ices

The optical properties of cryogenic water ices in the vacuum-ultraviolet spectral range are studied. more

Extreme Ultraviolet Detector Calibration Service

The extreme ultraviolet detector (EUVD) calibration service disseminates the U.S. national scale of detector responsivity in the wavelength range … more

EUV Zone Plates for Compact Solar Radiometers

This project is developing zone plate technology to enable compact solar radiometers for observing the solar 30.4-nm emission from ionized helium … more

SDO/EVE/ESP Calibration

NASA launched the Solar Dynamics Observatory ( SDO ) satellite on 11 Feb 2010 on a mission to study the sun. The EUV Variability Experiment ( EVE … more

Beamline 3: Center for Advanced Synchrotron Radiation-Based Metrology

Streamlining Detector-based Radiometry at SURF III NIST has maintained the Synchrotron Ultraviolet Radiation Facility (SURF) for nearly 6 decades … more

Synchrotron Ultraviolet Radiation Facility SURF III

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and … more

Beamline 7:  EUV reflectometry

The NIST/DARPA EUV Reflectometry facility began in the late 1980's to make measurements of the reflectivity of EUV multilayer optics for … more

Beamline 1: Degradation of EUV filters and mirrors

Beamline 1 separates a swath of light from the synchrotron into two parts. The first part is collected in Beamline 1a by a normal-incidence … more

Beamline 8: EUV Surface Chemistry & Lifetime

The purpose of the end station on Beamline 8 at the Synchrotron Ultraviolet Radiation Facility (SURF III) is to study the degradation of materials … more

Aluminum Oxide Photodetector Transfer Standard

Aluminum oxide (Al 2 O 3 ) photodiodes are issued by NIST as transfer standard detectors in the extreme ultraviolet spectral region (5 nm to 125 … more

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