@conference{107116,
  author = {Vincent Scheuerman and K Kreider and C Meyer and D Dewitt},
  title = {Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 Degrees Celsius},
  year = {2000},
  month = {2000-01-01},
  publisher = {International Symposium on Advanced Thermal Processing of Semiconductors, San Francisco, CA},
  language = {en},
}