@misc{1129916,
  author = {Janet M. Cassard and Jon Geist and Theodore V. Vorburger and David T. Read and Michael Gaitan and David G. Seiler},
  title = {Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition:},
  year = {2013},
  month = {2013-02-01 05:02:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-177},
  language = {en},
}