@misc{1129976, author = {Todd E Harvey and Albert J Paul and Lawrence H Robins and Kris A Bertness}, title = {Standard Reference Materials 2840 to 2482:Composition standards for AlGaAs epitaxial layers}, year = {2006}, month = {2006-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.SP.260-163}, language = {en}, }