@misc{1139381, author = {Stephen Knight and Joaquin V Martinez de Pinillos and Michele Buckley}, title = {Semiconductor microelectronics and nanoelectronics programs:}, year = {2006}, month = {2006-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.7321}, language = {en}, }