@misc{1139546,
  author = {Janet C Marshall and Robert I Scace and Winthrop A Baylies},
  title = {MEMS length and strain round robin results with uncertainty analysis:},
  year = {2006},
  month = {2006-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7291},
  language = {en},
}