@misc{1146821,
  author = {C K Shih and R J Colton},
  title = {Industrial applications of scanned probe microscopy:},
  year = {1994},
  month = {1994-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5550},
  language = {en},
}