@misc{1146991, author = {Claude A Klein and Grant Lu}, title = {Workshop on characterizing diamond films III::February 23-24, 1994, Gaithersburg, MD}, year = {1994}, month = {1994-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.5418}, language = {en}, }