@misc{1154886,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices ::quarterly report, October 1 to December 31, 1969},
  year = {1970},
  month = {1970-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.527},
  language = {en},
}