@misc{1154966,
  author = {W Murray Bullis},
  title = {Measurement methods for the semiconductor device industry ::a summary of NBS activity},
  year = {1969},
  month = {1969-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.511},
  language = {en},
}