@misc{1158846,
  author = {Hae-Jeong Lee and Wen-Li Wu and Christopher L Soles},
  title = {NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy},
  year = {2004},
  month = {2004-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.960-13},
  language = {en},
}