@misc{1161236, author = {Kurt F J Heinrich and Dale E Newbury and Harvey Yakowitz}, title = {Use of Monte Carlo calculations in electron probe microanalysis and scanning electron microscopy:}, year = {1976}, month = {1976-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.460}, language = {en}, }