@misc{1161651,
  author = {John M Jerke and M Carroll Croarkin and Ruth N Varner},
  title = {Interlaboratory study on linewidth measurements for antireflective chromium photomasks:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-74},
  language = {en},
}