@misc{1161666,
  author = {R G Wilson and D M Jamba},
  title = {Differential capacitance-voltage profiling of Schottky barrier diodes for measuring implanted depth distributions in silicon:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-71},
  language = {en},
}