@misc{1161821,
  author = {John M Jerke},
  title = {Accurate linewidth measurements on integrated-circuit photomasks:},
  year = {1980},
  month = {1980-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-43},
  language = {en},
}