@misc{1161936,
  author = {Martin G Buehler},
  title = {Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon:},
  year = {1976},
  month = {1976-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-22},
  language = {en},
}