@article{117376,
  author = {D Tanenbaum and A Laracuente and A Gallagher},
  title = {Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition},
  year = {1996},
  number = {68},
  month = {1996-01-01},
  publisher = {Applied Physics Letters},
  language = {en},
}