@misc{1174686,
  author = {D Nyyssonen},
  title = {Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:},
  year = {1987},
  month = {1987-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.87-3618},
  language = {en},
}