@misc{1174861,
  author = {G P Carver and D B Novotny and R Hershey and J E Luther},
  title = {Double-level metallization ::annual report for October 1, 1985 to September 30, 1986},
  year = {1987},
  month = {1987-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.87-3579},
  language = {en},
}