@misc{1175121,
  author = {Jane Walters},
  title = {Semiconductor measurement technology ::a bibliography of NBS publications for the years 1962-1986},
  year = {1987},
  month = {1987-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.87-3522},
  language = {en},
}