@misc{1178056,
  author = {Benjamin A Moore and Stanley Ruthberg},
  title = {RADCNBS workshop moisture measurement and control for semiconductor devices, III ::proceedings of the RADC NBS workshop held at the National Bureau of Standards Gaithersburg, MD November 2-4, 1983},
  year = {1984},
  month = {1984-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.84-2852},
  language = {en},
}