@misc{1179506,
  author = {Nancy J Tighe},
  title = {Analysis of oxide and oxidematrix interfaces in silicon nitride:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.82-2574},
  language = {en},
}