@misc{1180366,
  author = {T J Russell},
  title = {Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.81-2413},
  language = {en},
}