@misc{1181561,
  author = {James R Ehrstein},
  title = {Some considerations regarding film thickness standards for the semiconductor industry:},
  year = {1980},
  month = {1980-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.80-2158},
  language = {en},
}