@misc{1181981,
  author = {N J Tighe and K Kuroda and T E Mitchell and A H Heuer},
  title = {In Situ oxidation of Y?O?-doped Si?N?:},
  year = {1980},
  month = {1980-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.80-2075},
  language = {en},
}