@misc{1185091,
  author = {Santos Mayo and Richard Y Koyama and Thomas F Leedy},
  title = {Control of mobile-ion contamination in oxidation ambients for MOS device processing:},
  year = {1978},
  month = {1978-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.77-1404},
  language = {en},
}