@article{118596,
  author = {A Mahan and A Gallagher},
  title = {Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 {?}/sec, <!-- Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up },
  year = {2001},
  number = {78},
  month = {2001-01-01},
  publisher = {Applied Physics Letters},
  language = {en},
}