@misc{1196691,
  author = {W Murray Bullis},
  title = {Evolution of silicon materials characterization:},
  year = {1993},
  month = {1993-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-92},
  language = {en},
}