@misc{1196751,
  author = {Barbara J Belzer and David L Blackburn},
  title = {Thin film reference materials development:},
  year = {1998},
  month = {1998-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-100},
  language = {en},
}