@misc{1196931,
  author = {James R Ehrstein and M Carroll Croarkin and Hung Kung Liu},
  title = {Standard Reference material ::the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition},
  year = {2006},
  month = {2006-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-131e2006},
  language = {en},
}