@misc{1196996,
  author = {Ruth N Varner and Carol F Vezzetti},
  title = {Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/},
  year = {1992},
  month = {1992-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-119},
  language = {en},
}