@misc{1200951,
  author = {Joaquin V Martinez de Pinillos and Yaw S Obeng and Michele Buckley},
  title = {Semiconductor Microelectronics and Nanoelectronics Programs:},
  year = {2009},
  month = {2009-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7604},
  language = {en},
}