@misc{1201846,
  author = {Clare Allocca and Stephen Freiman},
  title = {Materials Science and Engineering Laboratory ::Nanometrology FY 20042005 projects},
  year = {2005},
  month = {2005-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7130},
  language = {en},
}