@misc{1202061,
  author = {John A Dagata and Hiroshi Yokoyama and Francesc Perez-Murano},
  title = {Workshop summary report ::scanning probe nanolithography workshop},
  year = {2003},
  month = {2003-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7040},
  language = {en},
}