@misc{1202436,
  author = {Stephen Knight Pinillos and Michele Joaquin V Martinez de},
  title = {Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments},
  year = {2002},
  month = {2002-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6884},
  language = {en},
}