@misc{1203756,
  author = {K G Kreider and D P DeWitt and B K Tsai and B Lojek},
  title = {Workshop on temperature measurement of semiconductor wafers using thermocouples:},
  year = {2001},
  month = {2001-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6566},
  language = {en},
}