@misc{1205661,
  author = {J S Wallace and E R Jr Fuller and S W Freiman},
  title = {Mechanical properties of aluminum nitride substrates:},
  year = {1996},
  month = {1996-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5903},
  language = {en},
}