@article{1242181,
  author = {Thomas A. Germer and Thomas Brian Renegar and Ulf Griesmann and Johannes A. Soons},
  title = {Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement},
  year = {2024},
  number = {12},
  month = {2024-05-08 04:05:00},
  publisher = {Surface Topography: Metrology and Properties},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956762},
  doi = {https://doi.org/10.1088/2051-672X/ad44bb},
  language = {en},
}