@article{1243771, author = {Sesha Challa and Nikolai Klimov and Paulina Kuo}, title = {Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform}, year = {2024}, number = {14}, month = {2024-06-10 04:06:00}, publisher = {AIP Advances}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957170}, doi = {https://doi.org/10.1063/6.0003522}, language = {en}, }