@misc{1246096,
  author = {Jay Wallace and Lin-Sien Lum},
  title = {Mechanical Properties of Aluminum Nitride Substrates},
  year = {1996},
  month = {1996-12-01 05:12:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850249},
  doi = {https://doi.org/10.6028/NIST.IR.5903},
  language = {en},
}