@conference{125126,
  author = {Francis Lovas and Benjamin Tsai and Charles Gibson},
  title = {Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST, ed. by M.C. Ozturk, F. Roozeboom, P.J. Timans, and S.H. Pas},
  year = {1998},
  number = {525},
  month = {1998-01-01},
  publisher = {Rapid Thermal and Integrated Processing. VII , San Francisco, CA},
  language = {en},
}