@conference{1252086, author = {Jacob Pawlik and Tomasz Karpisz and Nicholas Derimow and Sarah Evans and Jim Booth and Nate Orloff and Chris Long and Angela Stelson}, title = {Characterizing the Broadband RF Permittivity of 3D-Integrated Layers in a Glass Wafer Stack from 100 MHz to 30 GHz}, year = {2024}, month = {2024-07-30 04:07:00}, publisher = {2024 IEEE/MTT-S International Microwave Symposium - IMS 2024, Washington, DC, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957051}, doi = {https://doi.org/10.1109/IMS40175.2024.10600278}, language = {en}, }